BackCarleton University – Microelectronics Fabrication Laboratory
c/o Lyall Berndt, Facility Manager
University of Carelton
1125 Conel By Drive
Assets And Services
Carleton University's Microelectronics Fabrication Laboratory (MFL) is a flexible facility for manufacturing silicon integrated circuits and devices in support of research on process technology, device physics and modelling, innovative circuit techniques, photonics, biomedical devices, and microelectromechanical systems (MEMS). External users may access the MFF for research work or small-volume production runs subject to the availability of resources and the recovery of operating costs.
Prototyping and design
A notable strength of the facility is in MOS processing; MOS gate dielectrics can be produced with contamination at industrially acceptable levels. To illustrate this capability, it is worth noting that every year the MFL is used in a quasi-production mode to fabricate a multiproject chip in 5 micron LOCOS-isolated polysilicon gate nMOS technology containing designs submitted as a coursework project by fourth year students. These designs typically contain 50 to 100 transistors. Working chips are returned for testing within approximately three weeks of submission of CAD files, and wafer-level probing usually indicates yields of over 80% for the circuits.